2019
- N. I. Chkhalo, A. Y. Lopatin, A. N. Nechay, D. E. Pariev, A. E. Pestov, V. N. Polkovnikov, N. N. Salashchenko, F. Schäfers, M. G. Sertsu, A. A. Sokolov, M. V. Svechnikov, Tsybin, and S. Y. Zuev, «Beryllium-Based Multilayer Mirrors and Filters for the Extreme Ultraviolet Range,» J. Nanosci. Nanotechnol. 19(1), 546–553 (2019).
- V. N. Polkovnikov, N. I. Chkhalo, E. Meltchakov, F. Delmotte, S. Yu. Zuev, N. N. Salashchenko, M. V. Svechnikov, N. N. Tsybin. “Stable Multilayer Reflective Coatings for λ(HeI) = 58.4 nm for the KORTES Solar Telescope,” Technical Physics Letters, February 2019, Volume 45, Issue 2, pp 85–88.
- Vladimir N. Polkovnikov, Nikolai I. Chkhalo, Roman S. Pleshkov, Nikolai N. Salashchenko, Franz Schäfers, Mewael G. Sertsu, Andrey Sokolov, Mikhail V. Svechnikov, and Sergei Yu. Zuev, «Stable high-reflection Be/Mg multilayer mirrors for solar astronomy at 30.4 nm,» Opt. Lett. 44, 263-266 (2019).
- M. M. Barysheva, S. A. Garakhin, S. Y. Zuev, V. N. Polkovnikov, N. N. Salashchenko, M. V Svechnikov, N. I. Chkhalo, and S. Yulin, «Comparison of approaches in the manufacture of broadband mirrors for the EUV range: aperiodic and stack structures,» Quantum Electron. 49(4), 380–385 (2019).
- Vainer Yu. A., Garakhin S.A.*, Polkovnikov V.N., Salashchenko N.N., Svechnikov M.V., Chkhalo N.I., Yunin P.A. “Microstructure and Density of Mo Films in Multilayer Mo/Si Mirrors,” Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques, January 2019, Volume 13, Issue 1, pp 8–13.
- S. Yu. Zuyev, D. E. Pariev, R. S. Pleshkov, V. N. Polkovnikov, N. N. Salashchenko, M. V. Svechnikov, M. G. Sertsu, A. Sokolov, N. I. Chkhalo, F. Schäfers. “Mo/Si Multilayer Mirrors with B4C and Be Barrier Layers,” Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques, March 2019, Volume 13, Issue 2, pp 169–172.
- A. A. Akhsakhalyan, Yu. A. Vainer, S. A. Garakhin, K. A. Elina, P. S. Zavertkin, S. Yu. Zuev, D. V. Ivlyushkin, A. N. Nechay, A. D. Nikolenko, D. E. Pariev, R. S. Pleshkov, V. N. Polkovnikov, N. N. Salashchenko, M. V. Svechnikov, N. I. Chkhalo. “Set of Multilayer X-Ray Mirrors for a Double-Mirror Monochromator Operating in the Wavelength Range of 0.41–15.5 nm,” Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques, January 2019, Volume 13, Issue 1, pp 1–7
2018
- A. N. Nechay, N. I. Chkhalo, M. N. Drozdov, S. A. Garakhin, D. E. Pariev, V. N. Polkovnikov, N. N. Salashchenko, M. V. Svechnikov, Y. A. Vainer, E. Meltchakov, and F. Delmotte, «Study of oxidation processes in Mo/Be multilayers,» AIP Adv. 8(7), 075202 (2018).
- V. Svechnikov, N. I. Chkhalo, S. A. Gusev, A. N. Nechay, D. E. Pariev, A. E. Pestov, V. N. Polkovnikov, D. A. Tatarskiy, N. N. Salashchenko, F. Schäfers, M. G. Sertsu, A. Sokolov, Y. A. Vainer, and M. V. Zorina, «Influence of barrier interlayers on the performance of Mo/Be multilayer mirrors for next-generation EUV lithography,» Opt. Express 26, 33718-33731 (2018)
2017
- S. A. Garakhin, I. G. Zabrodin, S. Y. Zuev, I. A. Kas’kov, A. Y. Lopatin, A. N. Nechay, V. N. Polkovnikov, N. N. Salashchenko, N. N. Tsybin, N. I. Chkhalo, and M. V Svechnikov, «Laboratory reflectometer for the investigation of optical elements in a wavelength range of 5 – 50 nm: description and testing results,» Quantum Electron. 47, 385–392 (2017).
- A. D. Akhsakhalyan, E. B. Kluenkov, A. Y. Lopatin, V. I. Luchin, A. N. Nechay, A. E. Pestov, V. N. Polkovnikov, N. N. Salashchenko, M. V. Svechnikov, M. N. Toropov, N. N. Tsybin, N. I. Chkhalo, and A. V. Shcherbakov, «Current status and development prospects for multilayer X-ray optics at the Institute for Physics of Microstructures, Russian Academy of Sciences,» J. Surf. Investig. X-ray, Synchrotron Neutron Tech. 11, 1–19 (2017).
- N. I. Chkhalo, D. E. Pariev, V. N. Polkovnikov, N. N. Salashchenko, R. A. Shaposhnikov, I. L. Stroulea, M. V. Svechnikov, Y. A. Vainer, and S. Y. Zuev, «Be/Al-based multilayer mirrors with improved reflection and spectral selectivity for solar astronomy above 17 nm wavelength,» Thin Solid Films 631, 106–111 (2017).
- N. I. Chkhalo, S. A. Gusev, A. N. Nechay, D. E. Pariev, V. N. Polkovnikov, N. N. Salashchenko, F. Schäfers, M. G. Sertsu, A. Sokolov, M. V. Svechnikov, and D. A. Tatarsky, «High-reflection Mo/Be/Si multilayers for EUV lithography,» Opt. Lett. 42, 5070 (2017).
- M. Svechnikov, D. Pariev, A. Nechay, N. Salashchenko, N. Chkhalo, Y. Vainer, and D. Gaman, «Extended model for the reconstruction of periodic multilayers from extreme ultraviolet and X-ray reflectivity data,» J. Appl. Crystallogr. 50, 1428–1440 (2017).
2015
- M. V. Svechnikov, N. I. Chkhalo, M. N. Toropov, N. N. Salashchenko, and M. V. Zorina, «Application of point diffraction interferometry for middle spatial frequency roughness detection,» Opt. Lett. 40, 159 (2015).
- N. I. Chkhalo, a. E. Pestov, N. N. Salashchenko, a. V. Sherbakov, E. V. Skorokhodov, and M. V. Svechnikov, «Sub-micrometer resolution proximity X-ray microscope with digital image registration,» Rev. Sci. Instrum. 86, 063701 (2015).
- M. V. Svechnikov, N. I. Chkhalo, M. N. Toropov, and N. N. Salashchenko, «Resolving capacity of the circular Zernike polynomials,» Opt. Express 23, 14677 (2015).
- D. A. Gavrilin, S. V. Kuzin, N. N. Salashchenko, M. V. Svechnikov, M. N. Toropov, N. I. Chkhalo, and A. A. Soloviev, «Application of point diffraction interferometry for measuring angular displacement to a sensitivity of 001 arcsec,» Appl. Opt. 54, 9315 (2015).
2014
- N. N. Salashchenko, M. V. Svechnikov, N. I. Chkhalo, and A. V. Sherbakov, «A Two-coordinate digital detector for microscopy in the soft X-ray region,» Bull. Russ. Acad. Sci. Phys. 78, (2014).
Contacts:
+7 (831) 417-94-76 add 122
svechnikov@ipmras.ru
svechnikovmv@gmail.com