2019

  1. N. I. Chkhalo, A. Y. Lopatin, A. N. Nechay, D. E. Pariev, A. E. Pestov, V. N. Polkovnikov, N. N. Salashchenko, F. Schäfers, M. G. Sertsu, A. A. Sokolov, M. V. Svechnikov, Tsybin, and S. Y. Zuev, «Beryllium-Based Multilayer Mirrors and Filters for the Extreme Ultraviolet Range,» J. Nanosci. Nanotechnol. 19(1), 546–553 (2019).
  2. V. N. Polkovnikov, N. I. Chkhalo, E. Meltchakov, F. Delmotte, S. Yu. Zuev, N. N. Salashchenko, M. V. Svechnikov, N. N. Tsybin. “Stable Multilayer Reflective Coatings for λ(HeI) = 58.4 nm for the KORTES Solar Telescope,” Technical Physics Letters, February 2019, Volume 45, Issue 2, pp 85–88.
  3. Vladimir N. Polkovnikov, Nikolai I. Chkhalo, Roman S. Pleshkov, Nikolai N. Salashchenko, Franz Schäfers, Mewael G. Sertsu, Andrey Sokolov, Mikhail V. Svechnikov, and Sergei Yu. Zuev, «Stable high-reflection Be/Mg multilayer mirrors for solar astronomy at 30.4  nm,» Opt. Lett. 44, 263-266 (2019).
  4. M. M. Barysheva, S. A. Garakhin, S. Y. Zuev, V. N. Polkovnikov, N. N. Salashchenko, M. V Svechnikov, N. I. Chkhalo, and S. Yulin, «Comparison of approaches in the manufacture of broadband mirrors for the EUV range: aperiodic and stack structures,» Quantum Electron. 49(4), 380–385 (2019).
  5. Vainer Yu. A., Garakhin S.A.*, Polkovnikov V.N., Salashchenko N.N., Svechnikov M.V., Chkhalo N.I., Yunin P.A. “Microstructure and Density of Mo Films in Multilayer Mo/Si Mirrors,” Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques, January 2019, Volume 13, Issue 1, pp 8–13.
  6. S. Yu. Zuyev, D. E. Pariev, R. S. Pleshkov, V. N. Polkovnikov,  N. N. Salashchenko, M. V. Svechnikov, M. G. Sertsu, A. Sokolov, N. I. Chkhalo, F. Schäfers. “Mo/Si Multilayer Mirrors with B4C and Be Barrier Layers,” Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques, March 2019, Volume 13, Issue 2, pp 169–172.
  7. A. A. Akhsakhalyan, Yu. A. Vainer, S. A. Garakhin, K. A. Elina, P. S. Zavertkin, S. Yu. Zuev, D. V. Ivlyushkin, A. N. Nechay, A. D. Nikolenko, D. E. Pariev, R. S. Pleshkov, V. N. Polkovnikov, N. N. Salashchenko, M. V. Svechnikov, N. I. Chkhalo. “Set of Multilayer X-Ray Mirrors for a Double-Mirror Monochromator Operating in the Wavelength Range of 0.41–15.5 nm,” Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques, January 2019, Volume 13, Issue 1, pp 1–7

2018

  1. A. N. Nechay, N. I. Chkhalo, M. N. Drozdov, S. A. Garakhin, D. E. Pariev, V. N. Polkovnikov, N. N. Salashchenko, M. V. Svechnikov, Y. A. Vainer, E. Meltchakov, and F. Delmotte, «Study of oxidation processes in Mo/Be multilayers,» AIP Adv. 8(7), 075202 (2018).
  2. V. Svechnikov, N. I. Chkhalo, S. A. Gusev, A. N. Nechay, D. E. Pariev, A. E. Pestov, V. N. Polkovnikov, D. A. Tatarskiy, N. N. Salashchenko, F. Schäfers, M. G. Sertsu, A. Sokolov, Y. A. Vainer, and M. V. Zorina, «Influence of barrier interlayers on the performance of Mo/Be multilayer mirrors for next-generation EUV lithography,» Opt. Express 26, 33718-33731 (2018)

2017

  1. S. A. Garakhin, I. G. Zabrodin, S. Y. Zuev, I. A. Kas’kov, A. Y. Lopatin, A. N. Nechay, V. N. Polkovnikov, N. N. Salashchenko, N. N. Tsybin, N. I. Chkhalo, and M. V Svechnikov, «Laboratory reflectometer for the investigation of optical elements in a wavelength range of 5 – 50 nm: description and testing results,» Quantum Electron. 47, 385–392 (2017).
  2. A. D. Akhsakhalyan, E. B. Kluenkov, A. Y. Lopatin, V. I. Luchin, A. N. Nechay, A. E. Pestov, V. N. Polkovnikov, N. N. Salashchenko, M. V. Svechnikov, M. N. Toropov, N. N. Tsybin, N. I. Chkhalo, and A. V. Shcherbakov, «Current status and development prospects for multilayer X-ray optics at the Institute for Physics of Microstructures, Russian Academy of Sciences,» J. Surf. Investig. X-ray, Synchrotron Neutron Tech. 11, 1–19 (2017).
  3. N. I. Chkhalo, D. E. Pariev, V. N. Polkovnikov, N. N. Salashchenko, R. A. Shaposhnikov, I. L. Stroulea, M. V. Svechnikov, Y. A. Vainer, and S. Y. Zuev, «Be/Al-based multilayer mirrors with improved reflection and spectral selectivity for solar astronomy above 17 nm wavelength,» Thin Solid Films 631, 106–111 (2017).
  4. N. I. Chkhalo, S. A. Gusev, A. N. Nechay, D. E. Pariev, V. N. Polkovnikov, N. N. Salashchenko, F. Schäfers, M. G. Sertsu, A. Sokolov, M. V. Svechnikov, and D. A. Tatarsky, «High-reflection Mo/Be/Si multilayers for EUV lithography,» Opt. Lett. 42, 5070 (2017).
  5. M. Svechnikov, D. Pariev, A. Nechay, N. Salashchenko, N. Chkhalo, Y. Vainer, and D. Gaman, «Extended model for the reconstruction of periodic multilayers from extreme ultraviolet and X-ray reflectivity data,» J. Appl. Crystallogr. 50, 1428–1440 (2017).

2015

  1. M. V. Svechnikov, N. I. Chkhalo, M. N. Toropov, N. N. Salashchenko, and M. V. Zorina, «Application of point diffraction interferometry for middle spatial frequency roughness detection,» Opt. Lett. 40, 159 (2015).
  2. N. I. Chkhalo, a. E. Pestov, N. N. Salashchenko, a. V. Sherbakov, E. V. Skorokhodov, and M. V. Svechnikov, «Sub-micrometer resolution proximity X-ray microscope with digital image registration,» Rev. Sci. Instrum. 86, 063701 (2015).
  3. M. V. Svechnikov, N. I. Chkhalo, M. N. Toropov, and N. N. Salashchenko, «Resolving capacity of the circular Zernike polynomials,» Opt. Express 23, 14677 (2015).
  4. D. A. Gavrilin, S. V. Kuzin, N. N. Salashchenko, M. V. Svechnikov, M. N. Toropov, N. I. Chkhalo, and A. A. Soloviev, «Application of point diffraction interferometry for measuring angular displacement to a sensitivity of 001 arcsec,» Appl. Opt. 54, 9315 (2015).

2014

  1. N. N. Salashchenko, M. V. Svechnikov, N. I. Chkhalo, and A. V. Sherbakov, «A Two-coordinate digital detector for microscopy in the soft X-ray region,» Bull. Russ. Acad. Sci. Phys. 78, (2014).

Contacts:

+7 (831) 417-94-76 add 122
svechnikov@ipmras.ru
svechnikovmv@gmail.com